✦ LIBER ✦
SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Investigation on the dielectric behavior of aluminum nitride thin films at different temperatures applying a time-zero approach
✍ Scribed by Schneider, Michael; Bittner, Achim; Schmid, Ulrich; Schmid, Ulrich; Sánchez de Rojas Aldavero, José Luis; Leester-Schaedel, Monika
- Book ID
- 121423885
- Publisher
- SPIE
- Year
- 2013
- Weight
- 656 KB
- Volume
- 8763
- Category
- Article
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