Analysis of three-dimensional SIMS image
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Srivastava, M.; Petersen, N. O.; Mount, G. R.; Kingston, D. M.; McIntyre, N. S.
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Article
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1998
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John Wiley and Sons
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English
β 400 KB
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Three-dimensional (3D) SIMS images of secondary ion distributions in a solid volume can be produced from a stack of individual images acquired sequentially at di β erent depths during depth proΓling of the solid. While it is often possible to obtain visual correlations of large-scale features that oc