Analysis of three-dimensional SIMS images using image cross-correlation spectroscopy

✍ Scribed by Srivastava, M.; Petersen, N. O.; Mount, G. R.; Kingston, D. M.; McIntyre, N. S.

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 400 KB
• Volume: 26
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199803)26:3<188::aid-sia359>3.0.co;2-e

✦ Synopsis

Three-dimensional (3D) SIMS images of secondary ion distributions in a solid volume can be produced from a stack of individual images acquired sequentially at di †erent depths during depth proÐling of the solid. While it is often possible to obtain visual correlations of large-scale features that occur in several images in the stack, the correlation of less-obvious features requires a more mathematical approach. We present here two cases where image cross-correlation spectroscopy (ICCS) can be used to clarify the presence or absence of organized structure in a 3D depth proÐle. In one example, the images of deuterium distribution in a zirconium oxide thin Ðlm were conÐrmed to exhibit order over a series of images, thereby suggesting the existence of continuous pores in the material. In a second example, the apparent clustering of gold distributions in a 3D proÐle of an arsenopyrite mineral was shown to be uncorrelated and likely an artefact of data collection.