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Size tuning of luminescent silicon nanoparticles with meso-porous silicon membranes

✍ Scribed by T. Serdiuk; V. Lysenko; S. Alekseev; V.A. Skryshevsky

Book ID
113688792
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
1002 KB
Volume
364
Category
Article
ISSN
0021-9797

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## Abstract A thin porous silicon (PS) membrane has been fabricated by electrochemical etching in a hydrofluoric acid (HF) electrolyte in a simple new process. Membrane areas (0.3 mm^2^) were defined photolithographically by SU8 negative resist. The etching current was varied during the single‐step