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Size-resolved particle deposition velocities of sub-100 nm diameter particles over a forest

โœ Scribed by S.C. Pryor


Book ID
113477057
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
228 KB
Volume
40
Category
Article
ISSN
1352-2310

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Electrical properties of sub-100 nm
โœ A. Inberg; E. Glickman; T. Asher; N. Fishelson; Y. Shacham-Diamand ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 589 KB

Self-assembled organic monolayers (SAMs) are good coupling agents and diffusion barriers at Cu/SiO 2 and Cu/ low-k interfaces and are considered therefore as important elements of future all-wet ULSI metallization with sub-45 nm Cu deposited by electroless plating (ELD). We formed SAM of 3-aminoprop