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Size control of Si nanocrystals by two-step rapid thermal annealing of sputtered Si-rich oxide/SiO2superlattice

✍ Scribed by Samson T. H. Silalahi; Q. V. Vu; H. Y. Yang; K. Pita; Yu Mingbin

Publisher: Springer
Year: 2010
Tongue: English
Weight: 765 KB
Volume: 98
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-010-5555-x

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