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SiO[sub 2] Chemical Vapor Deposition at Room Temperature Using SiCl[sub 4] and H[sub 2]O with an NH[sub 3] Catalyst

✍ Scribed by Klaus, J. W.; George, S. M.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

ALD of SiO[sub 2] at Room Temperature Us

✍ Ferguson, J. D.; Smith, E. R.; Weimer, A. W.; George, S. M. 📂 Article 📅 2004 🏛 The Electrochemical Society 🌐 English ⚖ 517 KB

Structure and magnetotransport propertie

✍ Liu, Hui 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 492 KB

High channel mobility 4H-SiC metal-oxide

✍ Hino, S.; Hatayama, T.; Kato, J.; Tokumitsu, E.; Miura, N.; Oomori, T. 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 237 KB