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SiNx-Submicrometer Coatings: Optimization of Film Properties

✍ Scribed by L. Tikana; M. Pohl; A. Zösch; W. Zahn; W. Wuttke

Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
682 KB
Volume
2
Category
Article
ISSN
1438-1656

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