Reflection and transmission ellipsometry
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F. Sagnard; D. Seetharamdoo; V. Le Glaunec
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Article
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2002
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John Wiley and Sons
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English
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## Abstract For in situ measurement of the complex permittivity of planar materials, a freeβspace system based on reflection or transmission ellipsometry has been developed and extended to microwave frequencies. Different angles of incidence were studied in the range [35β50Β°]. Original numerical me