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Single electron charging and transport in silicon rich oxide

✍ Scribed by Yu, Zhenrui; Aceves-Mijares, Mariano; Cabrera, Marco Antonio Ipiña


Book ID
121252256
Publisher
Institute of Physics
Year
2006
Tongue
English
Weight
538 KB
Volume
17
Category
Article
ISSN
0957-4484

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Single-electron charging in nanocrystall
✍ Z.A.K Durrani; T Kamiya; Y.T Tan; H Ahmed; N Lloyd 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 662 KB

Room-temperature single-electron effects are observed in 20 nm 3 20 nm point-contact transistors fabricated in nanocrystalline silicon thin films. The films are deposited using low-temperature plasma enhanced chemical vapour deposition and contain grains typically 4-8 nm in size. Low-temperature oxi