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Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

✍ Scribed by Parikh, N. R.; Hunn, J. D.; McGucken, E.; Swanson, M. L.; White, C. W.; Rudder, R. A.; Malta, D. P.; Posthill, J. B.; Markunas, R. J.


Book ID
120994755
Publisher
American Institute of Physics
Year
1992
Tongue
English
Weight
816 KB
Volume
61
Category
Article
ISSN
0003-6951

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