Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation

✍ Scribed by Mokuno, Y.; Chayahara, A.; Yamada, H.; Tsubouchi, N.

• Book ID: 121672965
• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 304 KB
• Volume: 18
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2009.04.005