Simultaneous determination of the thermal expansion coefficient and the elastic modulus of Ta 2 O 5 thin film using phase shifting interferometry

✍ Scribed by Tien, Chuen-Lin; Lee, Cheng-Chung; Chuang, Kie-Pin; Jaing, Cheng-Chung

• Book ID: 121426464
• Publisher: Taylor and Francis Group
• Year: 2000
• Tongue: English
• Weight: 738 KB
• Volume: 47
• Category: Article
• ISSN: 0950-0340
• DOI: 10.1080/09500340008231417