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Simulation with an improved plasma model utilized to design a new structure of microwave plasma discharge for chemical vapor deposition of diamond crystals

โœ Scribed by Yamada, Hideaki; Chayahara, Akiyoshi; Mokuno, Yoshiaki; Shikata, Shin-ichi


Book ID
121312388
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
466 KB
Volume
17
Category
Article
ISSN
0925-9635

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