Simulation of topography evolution and damage formation during TEM sample preparation using focused ion beams

✍ Scribed by W. Boxleitner; G. Hobler; V. Klüppel; H. Cerva

• Book ID: 114164650
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 648 KB
• Volume: 175-177
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)00334-2