In situ growth and characterization of u
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Bengu, E.; Collazo-Davila, C.; Grozea, D.; Landree, E.; Widlow, I.; Guruz, M.; M
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Article
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1998
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John Wiley and Sons
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English
⚖ 459 KB
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Results concerning the operation of a new ultrahigh vacuum (UHV) ion-beam assisted deposition system for in situ investigation of ultrahard thin films are reported. A molecular beam epitaxy (MBE) chamber attached to a surface science system (SPEAR) has been redesigned for deposition of cubic-boron n