Simulation of photochemical transformations and photodarkening in photoresist films exposed to pulsed vacuum-ultraviolet radiation

✍ Scribed by N. A. Kaliteevskaya; R. P. Seisyan

• Book ID: 110120433
• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 61 KB
• Volume: 34
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/1.1188082