✦ LIBER ✦

Simulation of optical lithography and inspection

✍ Scribed by Andrew R. Neureuther

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical lithography simulation: Introduc

✍ Douglas A. Bernard 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 568 KB

Limits of electron optical defect inspec

✍ F.E. Endruschat; M. Börner; K.-H. Müller 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 342 KB

Inspection and process control in DSW li

✍ Mircea Dusa; Gabriela Drǎgan 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 164 KB

Simulation of defects in 3-dimensional r

✍ W. Henke; D. Mewes; M. Weiβ; G. Czech; R. Schieβl-Hoyler 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 520 KB

Limits of optical lithography

✍ Janusz S. Wilczynski 📂 Article 📅 1986 🏛 Society for Plastic Engineers 🌐 English ⚖ 61 KB

The simulation of contrast-enhanced lith

✍ Wen-an Loong; Hong-tsz Pan 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 445 KB