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Simulation of low-energy HCI-solid interaction

✍ Scribed by Yasunori Yamamura; Sachiko T. Nakagawa; Hiro Tawara


Book ID
113286370
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
665 KB
Volume
98
Category
Article
ISSN
0168-583X

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A new Monte-Carlo program for simulation of low energy electron scattering in solids is presented. Applications to electron microscopy and electron microprobe analysis are discussed. Elastic interactions are described by Mott cross sections within the framework of partial wave analysis (PWA) whereas