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Simulation of fluorine interaction with a silicon surface

✍ Scribed by G.V. Gadiyak; Yu.N. Morokov; D.N. Mukhin

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 236 KB
Volume: 60-61
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90406-n

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