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Interaction of SiF3 with silicon surface: Molecular dynamics simulation

✍ Scribed by F. Gou; Q. Xie; L. Zhu; Sun Weili; Xu Ming

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 341 KB
Volume: 248
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.03.175

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