Simulation calculations of physical sputtering and reflection coefficient of plasma-irradiated carbon surface

✍ Scribed by T. Kawamura; T. Ono; Y. Yamamura

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 258 KB
• Volume: 220-222
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(94)00463-3