Simulation calculation of ion-induced sputtering yields for plasma-irradiated solid surfaces

✍ Scribed by Y. Yamamura; T. Kawamura

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 398 KB
• Volume: 176-177
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(90)90109-z