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SIMS study on redistribution of implanted impurities in InSb and InAs during post-implantation annealing

โœ Scribed by N.N. Gerasimenko; G.S. Khryashchev; G.L. Kuryshev; A.M. Myasnikov; V.I. Obodnikov


Book ID
118400065
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
367 KB
Volume
111
Category
Article
ISSN
0168-583X

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