SIMS depth profiling of multilayer metal-oxide thin films — improved accuracy using a xenon primary ion

✍ Scribed by N.S. McIntyre; D. Johnston; W.J. Chauvin; W.M. Lau; K. Nietering; D. Schuetzle; K. Shankar; J.E. Macdonald

• Book ID: 113276761
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 749 KB
• Volume: 12
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(85)90038-2