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SIMS analysis of ZnO films co-doped with N and Ga by temperature gradient pulsed laser deposition

✍ Scribed by M. Sumiya; A. Tsukazaki; S. Fuke; A. Ohtomo; H. Koinuma; M. Kawasaki

Book ID
108418202
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
126 KB
Volume
223
Category
Article
ISSN
0169-4332

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## Abstract InAs co‐doped ZnO films were grown on sapphire substrates by pulsed laser deposition. The grown films have been characterized using X‐ray diffraction (XRD), Hall effect measurements, Atomic force microscope (AFM) and Field emission scanning electron microscope (FESEM) in order to invest