Simplified three-dimensional computer simulation formulae for film thickness distribution in the LPCVD process

✍ Scribed by Ji-Tao Wang; Shi-Li Zhang; Yong-Fa Wang

• Book ID: 107856805
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 526 KB
• Volume: 29
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(86)90099-7