✦ LIBER ✦
Simplified three-dimensional computer simulation formulae for film thickness distribution in the LPCVD process : Ji-Tao Wang, Shi-Li Zhang and Yong-Fa Wang. Solid-St. Electron.29(10), 999 (1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 126 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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