Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

✍ Scribed by Buyle, G.; Depla, D.; Eufinger, K.; Haemers, J.; De Gryse, R.; De Bosscher, W.

• Book ID: 118178065
• Publisher: AVS (American Vacuum Society)
• Year: 2003
• Tongue: English
• Weight: 426 KB
• Volume: 21
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.1572169