Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

✍ Scribed by M Koh; S Sawara; T Shinada; T Goto; Y Ando; I Ohdomari

• Book ID: 108416217
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 549 KB
• Volume: 162-163
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(00)00257-9