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Simple high resolution nanoimprint-lithography

✍ Scribed by M. Häffner; A. Heeren; M. Fleischer; D.P. Kern; G. Schmidt; L.W. Molenkamp

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
640 KB
Volume
84
Category
Article
ISSN
0167-9317

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