Silicon wafer processing by application of spun-on doped and undoped silica layers : J. A. Becker. Solid St. Electron.17, 87 (1974)

• Book ID: 103275470
• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 109 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90504-6