𝔖 Bobbio Scriptorium
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Silicon ultraviolet photodetectors

✍ Scribed by V.M. Arutyunyan; G.K. Berberian


Book ID
108028096
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
322 KB
Volume
32
Category
Article
ISSN
0924-4247

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## Abstract A metal–semiconductor–metal photoconductive detector has been fabricated from porous silicon. To that aim low conductive p‐type Si (20 Ω cm) has been porosified and several rapid‐thermal treatment steps applied before deposition of Al‐contacts. The photo response was investigated in the