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Silicon particle growth in a fluidized-bed reactor

✍ Scribed by George Hsu; Naresh Rohatgi; John Houseman

Publisher: American Institute of Chemical Engineers
Year: 1987
Tongue: English
Weight: 674 KB
Volume: 33
Category: Article
ISSN: 0001-1541
DOI: 10.1002/aic.690330511

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✦ Synopsis

This paper describes the overall operation of a 15 cm dia. fluidizedbed reactor for silicon production via silane pyrolysis. The fluidized-bed reactor has been characterized by its performance data and parametric effects. A withdrawal system is used to selectively remove big particles. Seed generation is provided by a fluid jet milling device, which avoids metallic grinding contamination. The silicon particle size growth calculated from a scavengingldeposition model agrees with actual size measurements.

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