Silicon oxide barrier films deposited on PET foils in pulsed plasmas: influence of substrate bias on deposition process and film properties

✍ Scribed by Steves, S; Ozkaya, B; Liu, C-N; Ozcan, O; Bibinov, N; Grundmeier, G; Awakowicz, P

• Book ID: 124065784
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 590 KB
• Volume: 46
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/46/8/084013