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Silicon nitride films on silicon for optical waveguides

✍ Scribed by Stutius, W. ;Streifer, W.

Book ID: 115325843
Publisher: The Optical Society
Year: 1977
Tongue: English
Weight: 672 KB
Volume: 16
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.16.003218

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