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Silicon-nitride surface passivation of submicrometer silicon waveguides for low-power optical switches

✍ Scribed by Van Campenhout, Joris; Green, William M. J.; Liu, Xiaoping; Assefa, Solomon; Osgood, Richard M.; Vlasov, Yurii A.

Book ID: 115431864
Publisher: Optical Society of America
Year: 2009
Tongue: English
Weight: 352 KB
Volume: 34
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.34.001534

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