PECVD grown silicon nitride AR coatings
β
R. Kishore; S.N. Singh; B.K. Das
π
Article
π
1992
π
Elsevier Science
π
English
β 405 KB
Silicon nitride films produced by plasma enhanced chemical vapor deposition (PECVD) have been studied as antireflection (AR) coating on polycrystalline silicon solar cells. A substantial enhancement (28%) in the short circuit current (Isc) has been obtained. The open circuit voltage (Voc) of these c