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Silicon nanostructures for photonics

✍ Scribed by Bettotti, P; Cazzanelli, M; Negro, L Dal; Danese, B; Gaburro, Z; Oton, C J; Prakash, G Vijaya; Pavesi, L

Book ID: 111675636
Publisher: Institute of Physics
Year: 2002
Tongue: English
Weight: 941 KB
Volume: 14
Category: Article
ISSN: 0953-8984
DOI: 10.1088/0953-8984/14/35/305

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## Abstract Anisotropic nanostructuring of bulk silicon (Si) wafers leads to a significant in‐plane optical anisotropy of single porous silicon (PSi) layers. Additionally a variation of the etching current in time allows a controlled modification of the porosity along the growth direction and there