Silicon nanoprofiling with the use of a solid aluminum oxide mask and combined “dry” etching

✍ Scribed by A. N. Belov; Yu. A. Demidov; M. G. Putrya; A. A. Golishnikov; A. A. Vasilyev

• Book ID: 111444505
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 267 KB
• Volume: 43
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782609130090