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Local etching of silicon using a solid mask from porous aluminum oxide

✍ Scribed by A. N. Belov

Book ID: 111444194
Publisher: Springer
Year: 2008
Tongue: English
Weight: 260 KB
Volume: 42
Category: Article
ISSN: 1063-7826
DOI: 10.1134/s1063782608130149

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