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Silicon microstrip detectors for future tracker alignment systems

✍ Scribed by D. Bassignana; G. Pellegrini; M. Lozano; M. Fernández; I. Vila; A. Virto; R. Jaramillo; F.J. Munoz

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
649 KB
Volume
628
Category
Article
ISSN
0168-9002

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An investigation has been made into the behaviour of high-purity silicon (HP-%) during the fabrication of microstrip detectors. The resistivity of the silicon used is 3 kS1 cm. The investigation is centred on standard bipolar processes based on ion implantation. It is found that, comparing the proce