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Silicon melt convection in large size Czochralski crucibles

✍ Scribed by J. Virbulis; Th. Wetzel; E. Tomzig; W. von Ammon

Book ID
104420656
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
315 KB
Volume
5
Category
Article
ISSN
1369-8001

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## Abstract In order to understand the influence of crucible geometry combined with natural convection and Marangoni convection on melt flow pattern, temperature and pressure fields in silicon Czochralski crystal growth process, a set of numerical simulations was conducted. We carry out calculation