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Silicon interstitials generation during the exposure of silicon to hydrogen plasma

✍ Scribed by R. Tonini; A. Monelli; F. Corni; S. Frabboni; G. Ottaviani; G. Queirolo

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
356 KB
Volume
36
Category
Article
ISSN
0921-5107

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