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Silicon fusion bonding and its characterization

✍ Scribed by Harendt, C; Graf, H G; Hofflinger, B; Penteker, E

Book ID: 121513776
Publisher: Institute of Physics
Year: 1992
Tongue: English
Weight: 294 KB
Volume: 2
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/2/3/001

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