Silicon Epitaxial Layers with Non-Uniform Doping Profiles (I). The Model Parameters' Adjustment

✍ Scribed by J. Halaj

• Book ID: 102133146
• Publisher: John Wiley and Sons
• Year: 1993
• Tongue: English
• Weight: 351 KB
• Volume: 28
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.2170280808