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Silicon epilayers grown by chemical vapor deposition from high-purity silane

✍ Scribed by A. V. Gusev; O. F. Udalov; V. S. Krasil’nikov; G. A. Maksimov; A. V. Kornaukhov; O. A. Kuznetsov; E. A. Uskova; V. B. Shmagin

No coin nor oath required. For personal study only.

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