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Silicon Dioxide Passivation of p-n Junction Particle Detectors

✍ Scribed by Madden, T. C.; Gibson, W. M.


Book ID
125422988
Publisher
American Institute of Physics
Year
1963
Tongue
English
Weight
714 KB
Volume
34
Category
Article
ISSN
0034-6748

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Si planar technology and ton unplantatlon were used for manufacturmg shallow p+n lunctlon nuclear rachatlon detectors Theu charactenstics were mvestlgated as a function of alternatwe unplantation steps mtb and v&out preamorphlsatlon by Si (SifB, Sl+BF,, B, BF,) The influence of Ar lmplantatlon on th