Silicon damage and residue overlayer caused by rie and ribe processes with CHF3

✍ Scribed by Ch. Cardinaud; G. Turban; B. Grolleau; J.P. Grandchamp; C. Lejeune; P. Scheiblin; E. Collard

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 469 KB
• Volume: 36
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90927-6