✦ LIBER ✦
Damage effects in silicon and MNOS structures caused by beams of ionized and neutral argon atoms with energies below 5 keV
✍ Scribed by U Bangert; C Jeynes; P Goodhew; IH Wilson
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 346 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0042-207X
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